JPH0318407Y2 - - Google Patents

Info

Publication number
JPH0318407Y2
JPH0318407Y2 JP1986142384U JP14238486U JPH0318407Y2 JP H0318407 Y2 JPH0318407 Y2 JP H0318407Y2 JP 1986142384 U JP1986142384 U JP 1986142384U JP 14238486 U JP14238486 U JP 14238486U JP H0318407 Y2 JPH0318407 Y2 JP H0318407Y2
Authority
JP
Japan
Prior art keywords
transfer device
load
cleanliness
clean room
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986142384U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6348707U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986142384U priority Critical patent/JPH0318407Y2/ja
Publication of JPS6348707U publication Critical patent/JPS6348707U/ja
Application granted granted Critical
Publication of JPH0318407Y2 publication Critical patent/JPH0318407Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Ventilation (AREA)
JP1986142384U 1986-09-17 1986-09-17 Expired JPH0318407Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986142384U JPH0318407Y2 (en]) 1986-09-17 1986-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986142384U JPH0318407Y2 (en]) 1986-09-17 1986-09-17

Publications (2)

Publication Number Publication Date
JPS6348707U JPS6348707U (en]) 1988-04-02
JPH0318407Y2 true JPH0318407Y2 (en]) 1991-04-18

Family

ID=31051071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986142384U Expired JPH0318407Y2 (en]) 1986-09-17 1986-09-17

Country Status (1)

Country Link
JP (1) JPH0318407Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5217416B2 (ja) * 2007-12-25 2013-06-19 村田機械株式会社 保管庫及び入出庫方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0237764Y2 (en]) * 1984-10-11 1990-10-12

Also Published As

Publication number Publication date
JPS6348707U (en]) 1988-04-02

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